The influences of roughness on film thickness measurements by Mueller matrix ellipsometry
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چکیده
منابع مشابه
The influences of roughness on film t ickness measurements by Mueller matrix eiiipsometry
The accuracy of measurement of the thickness of uniform thin films on solid substrates by null ellipsometry is severely limited when the substrate is rough. It is impossible to separate these two effects experimentally with the null ellipsometer, and there is no theoretical basis or generally used model available to separate these effects. Thus, a dual rotating-compensator Mueller matrix ellips...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 1994
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.1144631